Attention Cleanroom Users: From 10/31/2016 to 11/4/2016 access to the Cleanroom will be limited. Please contact Dr. Sung Jin Kim at kim@miami.edu to access the facility.

Nanofabrication Facility

The Dr. John T. Macdonald Foundation Biomedical Nanotechnology Institute (BioNIUM) Nanofabrication Facility is a 2,800 ft2 space located in the UM Life Science & Technology Building. The facility consists of both a Class 100 and 1000 cleanroom and state-of-the art equipment that supports successful nanofabrication crucial to numerous technologies. With capabilities for thin film deposition, film etching & characterization, photolithography, electron beam lithography and scanning electron microscopy this facility supports research in the following areas:

BioMEMS Systems Solid-State Sensors Electronic Devices MEMS & NEMS
Optical MEMS Bio-Medical Devices Microfluidics Solar Cell System
Compound Semiconductors (III/V)  Device Fabrication Silicon Semiconductor Device Fabrication

 

The facility is open to both academic and industry users and provides on site one-on-one training. Please contact our Facility Manager, Kevin Luongo at This email address is being protected from spambots. You need JavaScript enabled to view it. or 305-243-0404 for more information on capabilities or to schedule training.