Attention Cleanroom Users: From 10/31/2016 to 11/4/2016 access to the Cleanroom will be limited. Please contact Dr. Sung Jin Kim at to access the facility.

Nanofabrication Facility

The Dr. John T. Macdonald Foundation Biomedical Nanotechnology Institute (BioNIUM) Nanofabrication Facility is a 2,800 ft2 space located in the UM Life Science & Technology Building. The facility consists of both a Class 100 and 1000 cleanroom and state-of-the art equipment that supports successful nanofabrication crucial to numerous technologies. With capabilities for thin film deposition, film etching & characterization, photolithography, electron beam lithography and scanning electron microscopy this facility supports research in the following areas:

BioMEMS Systems Solid-State Sensors Electronic Devices MEMS & NEMS
Optical MEMS Bio-Medical Devices Microfluidics Solar Cell System
Compound Semiconductors (III/V)  Device Fabrication Silicon Semiconductor Device Fabrication


The facility is open to both academic and industry users and provides on site one-on-one training. Please contact our Facility Manager, Kevin Luongo at This email address is being protected from spambots. You need JavaScript enabled to view it. or 305-243-0404 for more information on capabilities or to schedule training.