Attention Cleanroom Users: From 10/31/2016 to 11/4/2016 access to the Cleanroom will be limited. Please contact Dr. Sung Jin Kim at to access the facility.

Nanofabrication Facility

The Dr. John T. Macdonald Foundation Biomedical Nanotechnology Institute (BioNIUM) Nanofabrication Facility opened its doors at the Life Science and Technology Park (LSTP) in early 2015 and was incorporated into the University’s Core Facility Network in mid-2017. It is a 2,800 ft2 space located in the UM Life Science & Technology Building. The facility consists of both a Class 100 and 1000 cleanroom and state-of-the art equipment that supports successful nanofabrication crucial to numerous technologies. With capabilities for thin film deposition, film etching & characterization, photolithography, electron beam lithography and scanning electron microscopy this facility supports research in the following areas:

  • Electronic Devices - Sensors for gas, chemical, biological sensing, Nanoelectronics device
  • MEMS & NEMS – BioMEMS, Lab-on-a-Chip devices, Microfluidics
  • Optoelectronic Devices – Waveguides, LED, Photodetector, Solar cells, Nanophotonics device
  • Biomedical Devices – Micro filter, Micro needle, other micro tools
  • Nanomaterials – 1D, 2D material growth
  • Characterization and Packaging for various materials and devices

 The facility is open to both academic and industry users and provides on site one-on-one training. Please contact our Facility Manager, Kevin Luongo at This email address is being protected from spambots. You need JavaScript enabled to view it. or 305-243-0404 for more information on capabilities or to schedule training.