Nanofabrication Facility

Class 100 Lithography Cleanroom
Class 100 Lithography Cleanroom
Microfabrication Training at Class 1000 Cleanroom
Class 1000 Processing Cleanroom
Class 1000 Processing Cleanroom

The Dr. John T. Macdonald Foundation Biomedical Nanotechnology Institute (BioNIUM) Nanofabrication Facility opened its doors at the Converge Miami in early 2015 and was incorporated into the University’s Core Facility Network in mid-2017. It is a 2,800 ft2 space located in the UM Converge Miami Building. The facility consists of Class 100 and 1000 cleanrooms and state-of-the-art equipment supporting successful nanofabrication crucial to numerous technologies. With capabilities for thin film deposition, film etching & characterization, photolithography, electron beam lithography, and scanning electron microscopy, this facility supports research in the following areas:

  • Electronic & Nanoelectronics Devices – Semiconductor manufacturing & electronic chips, gas, chemical, and biological sensing sensors.
  • Biomedical Devices – Micro filter, Microneedle, other micro tools
  • MEMS & NEMS – BioMEMS, Lab-on-a-Chip devices, Microfluidics
  • Optoelectronic & Nanophotonics Devices – Waveguides, LED, Photodetector, Solar cells
  • Nanomaterials – 1D & 2D material growth
  • Characterization and Packaging for various materials and devices


The facility is open to academic and industry users and provides onsite one-on-one training. Please contact our Facility Director, Dr. Bahar Motlagh, at or 305-243-0404 for more information on capabilities or to schedule training.

You can take a Virtual Tour of our nanofabrication facility here