Nanofabrication Facility

Class 100 Lithography Cleanroom
Class 100 Lithography Cleanroom
Microfabrication Training at Class 1000 Cleanroom
Class 1000 Processing Cleanroom
Class 1000 Processing Cleanroom
The Dr. John T. Macdonald Foundation Biomedical Nanotechnology Institute (BioNIUM) Nanofabrication Facility opened its doors at the Life Science and Technology Park (LSTP) in early 2015 and was incorporated into the University’s Core Facility Network in mid-2017. It is a 2,800 ft2 space located in the UM Life Science & Technology Building. The facility consists of both a Class 100 and 1000 cleanroom and state-of-the art equipment that supports successful nanofabrication crucial to numerous technologies. With capabilities for thin film deposition, film etching & characterization, photolithography, electron beam lithography and scanning electron microscopy this facility supports research in the following areas:

  • Electronic Devices - Sensors for gas, chemical, biological sensing, Nanoelectronics device
  • MEMS & NEMS – BioMEMS, Lab-on-a-Chip devices, Microfluidics
  • Optoelectronic Devices – Waveguides, LED, Photodetector, Solar cells, Nanophotonics device
  • Biomedical Devices – Micro filter, Micro needle, other micro tools
  • Nanomaterials – 1D, 2D material growth
  • Characterization and Packaging for various materials and devices

The facility is open to both academic and industry users and provides on site one-on-one training. Please contact our Facility Director, Dr. Sung Jin Kim at or 305-243-0404 for more information on capabilities or to schedule training.

You can take a Virtual Tour of our nanofabrication facility here.