Tools

Cleanroom Class 100 & 1000 Equipment List

  • Dicing
    • PAXCO 1006 Dicing Saw
  • Electron Microscopy/ Microanalysis
    • JEOL JSM 7100F SEM
    • EDS
  • Electron-Beam Lithography
    • JEOL JSM 7100FTLV EBL
  • Thin-film Deposition
    • Angstrom Nexdep E-beam Evaporation, PVD
    • Angstrom Nexdep Thermal Evaporation, PVD
    • Angstrom Nexdep DC & RF Sputter deposition, PVD
    • Trion Technology Minilock Orion III PECVD
    • SCS Parylene Coater
    • SEM Carbon Coater
  • Hot Processing
    • Lindberg/Blue M Three Zone Tube Furnace
    • SSI Solaris 100RTP
  • Laser Lithography
    • Heidelberg µPG 101 Mask Maker
  • Metrology
    • 4 Multi Height RM3000 Probe Station
    • Bruker Dektak XT Profilometer
    • TF 268 Thin Film Measurement
    • Nikon Eclipse LV100ND Optical Microscope
  • Packaging
    • West Bond 454647E Wire Bonder
  • Photolithography
    • Brewer Science CEE 200X Precision Spin Coater
    • Hot plates
    • Oven
    • OAI Model 804 Mask Aligner
    • CleanZones, LLC PVL Downflow Exhausting Workstation for Developing of Pattern, Lift off after deposition, metal plating Class 100
    • CleanZones, LLC PVL Downflow Exhausting Workstation for Wet Chemical Etching, BOE/HF Class 1000
  • Plasma
    • Harrick Plasma Expanded Plasma Cleaner
    • RIE- Trion Phantom III Inductively Coupled Plasma/Reactive Ion Etching
  • Surface Analysis/ Characterization
    • Dimension 3100 AFM

Top